MicroElectroMechanical Systems (MEMS)
General description
The MEMS Division of MatEnTx Private Limited, provides advanced solutions in Design and Development of high performance Micro-Electro-Mechanical System (MEMS) devices for sensing and actuation applications. We integrate novel sensing techniques with enhanced sensitivity to design and develop customized solutions for Biomedical and Navigation Applications.
Applications
Some of the designs which have been Tapeout using SIO-MUMS process are as follows:
• MEMS Gyroscopes
• MEMS Accelerometers
• RF MEMS Switches
• MEMS Force Sensors
• Readout Electronics for MEMS Applications
Matentx MEMS Design Example

RF MEMS Switches

MEMS Accelerometer

MEMS Gyroscope

Resonant MEMS Force Sensors

MEMS Force Sensors


