MicroElectroMechanical Systems (MEMS)

General description

The MEMS Division of MatEnTx Private Limited, provides advanced solutions in Design and Development of high performance Micro-Electro-Mechanical System (MEMS) devices for sensing and actuation applications. We integrate novel sensing techniques with enhanced sensitivity to design and develop customized solutions for Biomedical and Navigation Applications.

Applications

Some of the designs which have been Tapeout using SIO-MUMS process are as follows:

• MEMS Gyroscopes

• MEMS Accelerometers

• RF MEMS Switches

• MEMS Force Sensors

• Readout Electronics for MEMS Applications

Matentx MEMS Design Example

RF MEMS Switches
MEMS Accelerometer
MEMS Gyroscope
Resonant MEMS Force Sensors
MEMS Force Sensors
MEMS Electrothermal Actuators